Please use this identifier to cite or link to this item: https://www.um.edu.mt/library/oar/handle/123456789/17626
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dc.contributor.authorGrixti, Ryan-
dc.contributor.authorGrech, Ivan-
dc.contributor.authorCasha, Owen-
dc.contributor.authorDarmanin, Jean Marie-
dc.contributor.authorGatt, Edward-
dc.contributor.authorMicallef, Joseph-
dc.date.accessioned2017-03-20T09:11:34Z-
dc.date.available2017-03-20T09:11:34Z-
dc.date.issued2015-
dc.identifier.citationGrixti, R., Grech, I., Casha, O., Darmanin, J. M., Gatt, E., & Micallef, J. (2015). Analysis and design of an electrostatic MEMS microphone using the PolyMUMPs process. Analog Integrated Circuits and Signal Processing, 82(3), 599-610.en_GB
dc.identifier.urihttps://www.um.edu.mt/library/oar//handle/123456789/17626-
dc.descriptionThe research work disclosed in this publication was funded through a scholarship scheme offered by ST-Microelectronics, Malta.en_GB
dc.description.abstractThis paper presents the analysis and design of an electrostatic MEMS microphone using the PolyMUMPs process with an additional back-etch processing step. Circular and square (simply supported and clamped) diaphragm designs are considered and analyzed, with the final design being based on the clamped square diaphragm with a bottom sound port. Although simply supported diaphragms exhibit high sensitivity for a given size, most MEMS fabrication processes such as the PolyMUMPS process, can only support clamped diaphragms. The effect of the back chamber volume on the microphone sensitivity is also investigated. The bias voltage is 6 V and the diaphragm has a side-length of 675 µm. The back-plate includes several holes which amount to a perforation ratio of 0.33. The maximum allowable input pressure before pull-in is 139 dB SPL. The microphone with a back-chamber volume of 6 mm3 exhibits a sensitivity of 8.4 mV/Pa at 94 dB SPL at an operating frequency of 1 kHz.en_GB
dc.language.isoenen_GB
dc.publisherSpringer USen_GB
dc.rightsinfo:eu-repo/semantics/restrictedAccessen_GB
dc.subjectMicroelectromechanical systemsen_GB
dc.subjectMicrophoneen_GB
dc.subjectDiaphragms (Structural engineering)en_GB
dc.subjectFrequency response (Electrical engineering)en_GB
dc.titleAnalysis and design of an electrostatic MEMS microphone using the PolyMUMPs processen_GB
dc.typearticleen_GB
dc.rights.holderThe copyright of this work belongs to the author(s)/publisher. The rights of this work are as defined by the appropriate Copyright Legislation or as modified by any successive legislation. Users may access this work and can make use of the information contained in accordance with the Copyright Legislation provided that the author must be properly acknowledged. Further distribution or reproduction in any format is prohibited without the prior permission of the copyright holder.en_GB
dc.description.reviewedpeer-revieweden_GB
dc.identifier.doi10.1007/s10470-014-0484-9-
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