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Faculty of Information and Communication Technology
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Dissertations - FacICT
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Issue Date
Title
Author(s)
2014
Feasibility study of a MEMS microphone design using the PolyMUMPs process
Grixti, Ryan
;
Grech, Ivan
;
Casha, Owen
;
Darmanin, Jean Marie
;
Gatt, Edward
;
Micallef, Joseph
2013
Design consideration for three-axis MEMS accelerometers using an asymmetric proof mass
Darmanin, Jean Marie
;
Grech, Ivan
;
Micallef, Joseph
;
Gatt, Edward
;
Casha, Owen
;
Briffa, Ansel
2013
Area minimization of a three-axis separate mass capacitive accelerometer using the ThELMA process
Briffa, Ansel
;
Gatt, Edward
;
Micallef, Joseph
;
Grech, Ivan
;
Casha, Owen
;
Darmanin, Jean Marie
2015
Analysis and design of an electrostatic MEMS microphone using the PolyMUMPs process
Grixti, Ryan
;
Grech, Ivan
;
Casha, Owen
;
Darmanin, Jean Marie
;
Gatt, Edward
;
Micallef, Joseph
Discover
Author
4
Casha, Owen
4
Grech, Ivan
2
Briffa, Ansel
2
Grixti, Ryan
Subject
4
Microelectromechanical systems
2
Accelerometers
2
Capacitance meters
1
Application-specific integrated c...
1
Diaphragms (Structural engineering)
1
Electrodes
1
Engineering design
1
Etching
1
Frequency response (Electrical en...
.
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