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DC Field | Value | Language |
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dc.contributor.author | Mule’ Stagno, Luciano | - |
dc.date.accessioned | 2018-02-05T09:03:17Z | - |
dc.date.available | 2018-02-05T09:03:17Z | - |
dc.date.issued | 2002 | - |
dc.identifier.citation | Mule Stagno, L. (2002). A technique for delineating defects in silicon. Solid State Phenomena, 82-84, 753-758. | en_GB |
dc.identifier.uri | https://www.um.edu.mt/library/oar//handle/123456789/26382 | - |
dc.description.abstract | A decoration and etching technique was developed to delineate several types of defects in silicon wafers, slugs and slabs. The technique was originally developed to detect interstitial type (A) defects but it has proved highly effective in decorating all kinds of other defects. Being fast, and requiring no special equipment except an inexpensive muffle furnace and a dedicated etch bench the technique has quickly become an integral part of our characterization portfolio. We discuss below how we have used this technique and its advantages over other methods used to detect A-defects. | en_GB |
dc.language.iso | en | en_GB |
dc.publisher | Scientific.Net | en_GB |
dc.rights | info:eu-repo/semantics/openAccess | en_GB |
dc.subject | Etching | en_GB |
dc.subject | Silicon | en_GB |
dc.subject | Copper | en_GB |
dc.title | A technique for delineating defects in silicon | en_GB |
dc.type | article | en_GB |
dc.rights.holder | The copyright of this work belongs to the author(s)/publisher. The rights of this work are as defined by the appropriate Copyright Legislation or as modified by any successive legislation. Users may access this work and can make use of the information contained in accordance with the Copyright Legislation provided that the author must be properly acknowledged. Further distribution or reproduction in any format is prohibited without the prior permission of the copyright holder. | en_GB |
dc.description.reviewed | peer-reviewed | en_GB |
dc.identifier.doi | 10.4028/www.scientific.net/SSP.82-84.753 | - |
dc.publication.title | Solid State Phenomena | en_GB |
Appears in Collections: | Scholarly Works - InsSE |
Files in This Item:
File | Description | Size | Format | |
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A_Technique.pdf | 1.75 MB | Adobe PDF | View/Open |
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