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DC Field | Value | Language |
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dc.contributor.author | Torok, Peter | - |
dc.contributor.author | Mule’ Stagno, Luciano | - |
dc.date.accessioned | 2018-02-05T10:10:13Z | - |
dc.date.available | 2018-02-05T10:10:13Z | - |
dc.date.issued | 1997 | - |
dc.identifier.citation | Torok, P., & Mule Stagno, L. (1997). Applications of scanning optical microscopy in materials science to detect bulk microdefects in semiconductors. Journal of Microscopy, 188(1), 1-16. | en_GB |
dc.identifier.uri | https://www.um.edu.mt/library/oar//handle/123456789/26394 | - |
dc.description.abstract | We review the application of scanning optical microscopy to bulk microdefect detection in semiconductor materials. After an extensive literature review we summarize theoretical aspects of the scanning infra-red microscope and describe the theory of contrast formation. We also show experimental examples of scanning infra-red images taken by different modes of the microscope and give an experimental confirmation of the contrast theory. | en_GB |
dc.language.iso | en | en_GB |
dc.publisher | Wiley-Blackwell Publishing Ltd. | en_GB |
dc.rights | info:eu-repo/semantics/restrictedAccess | en_GB |
dc.subject | Infrared telescopes | en_GB |
dc.subject | Micromechanics | en_GB |
dc.subject | Fracture mechanics | en_GB |
dc.title | Applications of scanning optical microscopy in materials science to detect bulk microdefects in semiconductors | en_GB |
dc.type | article | en_GB |
dc.rights.holder | The copyright of this work belongs to the author(s)/publisher. The rights of this work are as defined by the appropriate Copyright Legislation or as modified by any successive legislation. Users may access this work and can make use of the information contained in accordance with the Copyright Legislation provided that the author must be properly acknowledged. Further distribution or reproduction in any format is prohibited without the prior permission of the copyright holder. | en_GB |
dc.description.reviewed | peer-reviewed | en_GB |
dc.identifier.doi | 10.1046/j.1365-2818.1997.2420800.x | - |
dc.publication.title | Journal of Microscopy | en_GB |
Appears in Collections: | Scholarly Works - InsSE |
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File | Description | Size | Format | |
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T-r-k_et_al-1997-Journal_of_Microscopy.pdf Restricted Access | 1.82 MB | Adobe PDF | View/Open Request a copy |
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