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dc.contributor.authorTorok, Peter-
dc.contributor.authorMule Stagno, Luciano-
dc.identifier.citationTorok, P., & Mule Stagno, L. (1997). Applications of scanning optical microscopy in materials science to detect bulk microdefects in semiconductors. Journal of Microscopy, 188(1), 1-16.en_GB
dc.description.abstractWe review the application of scanning optical microscopy to bulk microdefect detection in semiconductor materials. After an extensive literature review we summarize theoretical aspects of the scanning infra-red microscope and describe the theory of contrast formation. We also show experimental examples of scanning infra-red images taken by different modes of the microscope and give an experimental confirmation of the contrast theory.en_GB
dc.publisherWiley-Blackwell Publishing Ltd.en_GB
dc.subjectInfrared telescopesen_GB
dc.subjectFracture mechanicsen_GB
dc.titleApplications of scanning optical microscopy in materials science to detect bulk microdefects in semiconductorsen_GB
dc.rights.holderThe copyright of this work belongs to the author(s)/publisher. The rights of this work are as defined by the appropriate Copyright Legislation or as modified by any successive legislation. Users may access this work and can make use of the information contained in accordance with the Copyright Legislation provided that the author must be properly acknowledged. Further distribution or reproduction in any format is prohibited without the prior permission of the copyright holder.en_GB
dc.publication.titleJournal of Microscopyen_GB
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