Please use this identifier to cite or link to this item:
Full metadata record
DC FieldValueLanguage
dc.contributor.authorFarrugia, Russell-
dc.contributor.authorGrech, Ivan-
dc.contributor.authorCamilleri, Duncan-
dc.contributor.authorCasha, Owen-
dc.contributor.authorGatt, Edward-
dc.contributor.authorMicallef, Joseph-
dc.identifier.citationFarrugia, R., Grech, I., Camilleri, D., Casha, O., Gatt, E., & Micallef, J. (2018). Theoretical and finite element analysis of dynamic deformation in resonating micromirrors. Microsystem Technologies, 24(1), 445-455.en_GB
dc.description.abstractDynamic deformation is one of the limiting factors in the design of high frequency resonating micro-scanners that are intended for high definition raster scanning display applications. Out-of-plane deformation resulting from high acceleration loads causes beam divergence, which will in turn reduce the optical resolution. This paper presents a detailed analysis on the mechanical design aspects contributing to dynamic deformation such as the micromirror layout and the micromirror-spring linkage design. The applicability of one-dimensional plate bending theory in evaluating micromirror deformation due to inertial loads is investigated using finite element analysis. Improved analytical dynamic deformation predictions, which take into consideration the two-dimensional mirror plate twist, will also be presented. A comparison among a number of layout designs was carried out with the aim of increasing micromirror bending stiffness in a direction parallel to the axis of rotation. Moreover, spring-linkage effects were also addressed and a significant improvement in dynamic deformation was achieved with the inclusion of a gimbal structure between the micromirror and the torsion springs. A parametric analysis was also carried out in order to optimise the gimbal frame design in order to comply with the Rayleigh diffraction limit criterion.en_GB
dc.subjectFibrous compositesen_GB
dc.subjectFinite element method -- Data processingen_GB
dc.subjectMicroelectromechanical systemsen_GB
dc.titleTheoretical and finite element analysis of dynamic deformation in resonating micromirrorsen_GB
dc.rights.holderThe copyright of this work belongs to the author(s)/publisher. The rights of this work are as defined by the appropriate Copyright Legislation or as modified by any successive legislation. Users may access this work and can make use of the information contained in accordance with the Copyright Legislation provided that the author must be properly acknowledged. Further distribution or reproduction in any format is prohibited without the prior permission of the copyright holderen_GB
dc.publication.titleMicrosystem Technologiesen_GB
Appears in Collections:Scholarly Works - FacEngME
Scholarly Works - FacICTMN

Files in This Item:
File Description SizeFormat 
Theoretical and finite element analysis_of_dynamic_deformation_in_resonating_micromirrors.pdf
  Restricted Access
2.66 MBAdobe PDFView/Open Request a copy

Items in OAR@UM are protected by copyright, with all rights reserved, unless otherwise indicated.