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Title: Capacitance measurement techniques in MOEMS angular vertical comb-drive actuators
Authors: Portelli, Barnaby
Farrugia, Russell
Grech, Ivan
Casha, Owen
Micallef, Joseph
Gatt, Edward
Keywords: Capacitance meters
Optical MEMS
Issue Date: 2017
Publisher: Institute of Electrical and Electronics Engineers
Citation: Portelli, B., Farrugia, R., Grech, I., Casha, O., Micallef, J. & Gatt, E. (2017). Capacitance measurement techniques in MOEMS angular vertical comb-drive actuators. 2017 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP), Bordeaux.
Abstract: This paper presents three novel techniques for the measurement of capacitance variation in high-frequency operation of angular comb-drive structures, with applications including optical projection micro-mirrors. The first technique uses a lock-in amplifier in order to measure the impedance of the comb structure by superimposing a test signal having a frequency that is at least one order of magnitude higher than the micro-mirror resonant frequency. The second measurement setup uses a digitizing oscilloscope to measure the capacitance from the instantaneous voltage and current in the comb structure. The third setup consists of a micro probe controlled by a high-resolution positioner in order to tilt the mirror to a desired angle. This allows for static capacitance measurement at different mirror deflection using a high precision LCR meter. The measurement results from the different setups were found to be in agreement with each other. The results were further verified against analytical and numerical modelling.
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