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https://www.um.edu.mt/library/oar/handle/123456789/59026
Title: | Capacitance measurement techniques in MOEMS angular vertical comb-drive actuators |
Authors: | Portelli, Barnaby Farrugia, Russell Grech, Ivan Casha, Owen Micallef, Joseph Gatt, Edward |
Keywords: | Capacitance meters Microactuators Optical MEMS Oscilloscopes |
Issue Date: | 2017 |
Publisher: | Institute of Electrical and Electronics Engineers |
Citation: | Portelli, B., Farrugia, R., Grech, I., Casha, O., Micallef, J. & Gatt, E. (2017). Capacitance measurement techniques in MOEMS angular vertical comb-drive actuators. 2017 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP), Bordeaux. |
Abstract: | This paper presents three novel techniques for the measurement of capacitance variation in high-frequency operation of angular comb-drive structures, with applications including optical projection micro-mirrors. The first technique uses a lock-in amplifier in order to measure the impedance of the comb structure by superimposing a test signal having a frequency that is at least one order of magnitude higher than the micro-mirror resonant frequency. The second measurement setup uses a digitizing oscilloscope to measure the capacitance from the instantaneous voltage and current in the comb structure. The third setup consists of a micro probe controlled by a high-resolution positioner in order to tilt the mirror to a desired angle. This allows for static capacitance measurement at different mirror deflection using a high precision LCR meter. The measurement results from the different setups were found to be in agreement with each other. The results were further verified against analytical and numerical modelling. |
URI: | https://www.um.edu.mt/library/oar/handle/123456789/59026 |
Appears in Collections: | Scholarly Works - FacICTMN |
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Capacitance_measurement_techniques_in_MOEMS_angular_vertical_comb-drive_actuators_2017.pdf Restricted Access | 821.1 kB | Adobe PDF | View/Open Request a copy |
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