Please use this identifier to cite or link to this item: https://www.um.edu.mt/library/oar/handle/123456789/59026
Title: Capacitance measurement techniques in MOEMS angular vertical comb-drive actuators
Authors: Portelli, Barnaby
Farrugia, Russell
Grech, Ivan
Casha, Owen
Micallef, Joseph
Gatt, Edward
Keywords: Capacitance meters
Microactuators
Optical MEMS
Oscilloscopes
Issue Date: 2017
Publisher: Institute of Electrical and Electronics Engineers
Citation: Portelli, B., Farrugia, R., Grech, I., Casha, O., Micallef, J. & Gatt, E. (2017). Capacitance measurement techniques in MOEMS angular vertical comb-drive actuators. 2017 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP), Bordeaux.
Abstract: This paper presents three novel techniques for the measurement of capacitance variation in high-frequency operation of angular comb-drive structures, with applications including optical projection micro-mirrors. The first technique uses a lock-in amplifier in order to measure the impedance of the comb structure by superimposing a test signal having a frequency that is at least one order of magnitude higher than the micro-mirror resonant frequency. The second measurement setup uses a digitizing oscilloscope to measure the capacitance from the instantaneous voltage and current in the comb structure. The third setup consists of a micro probe controlled by a high-resolution positioner in order to tilt the mirror to a desired angle. This allows for static capacitance measurement at different mirror deflection using a high precision LCR meter. The measurement results from the different setups were found to be in agreement with each other. The results were further verified against analytical and numerical modelling.
URI: https://www.um.edu.mt/library/oar/handle/123456789/59026
Appears in Collections:Scholarly Works - FacICTMN

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