Please use this identifier to cite or link to this item: https://www.um.edu.mt/library/oar/handle/123456789/59266
Title: A feasibility study on piezoelectric MEMS lateral bulk acoustic wave resonators including thermal effect
Authors: Bengashier, Mounira
Grech, Ivan
Casha, Owen
Portelli, Barnaby
Farrugia, Russell
Gatt, Edward
Keywords: Aluminum alloys
Finite element method
Lead compounds
Microelectromechanical systems
Resonators
Silicon-on-insulator technology
Titanium compounds
Wide gap semiconductors
Zirconium compounds
Issue Date: 2019
Publisher: Institute of Electrical and Electronics Engineers
Citation: Bengashier, M., Grech, I., Casha, O., Farrugia, R., Portelli, B., & Gatt, E. (2019). A feasibility study on piezoelectric MEMS lateral bulk acoustic wave resonators including thermal effect. 2019 Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS (DTIP), Paris.
Abstract: This paper presents a feasibility study on the design of piezoelectric MEMS lateral bulk acoustic wave resonators with particular reference to the thermal effect on the resonant frequency. This study compares the results obtained from both analytical models as well as finite element simulations with the temperature effects included. This comparative study has been carried out on resonators having a resonant frequency of around 19.5 MHz using two different Thin-Film Piezoelectric-on-Substrate (TPoS) MEMS processes: the first process consists of a 1 μm PZT layer over an SOI structure having a thickness of 5.5 μm, while the second process is the PiezoMUMPs MPW process consisting of a 0.5 μm AlN layer over an SOI structure having a thickness of 10 μm. Both the analytical and the finite element models indicate a frequency variation of 300 kHz over a temperature range of 273-573 K. Based on these results, a number of PiezoMUMPs resonator prototypes, including a thermal heating element, have been designed in order to explore the feasibility of fine tuning the resonant frequency using the thermal effect. The possibility of fine tuning can be applied to high precision timing circuits such as frequency counters.
URI: https://www.um.edu.mt/library/oar/handle/123456789/59266
Appears in Collections:Scholarly Works - FacICTMN



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