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Title: Resonant micro-mirror oscillation amplitude measurement and all digital actuation
Authors: Portelli, Barnaby
Grech, Ivan
Micallef, Joseph
Farrugia, Russell
Casha, Owen
Gatt, Edward
Keywords: Microelectromechanical systems
Optical MEMS
Optical instruments
Integrated optics
Issue Date: 2020
Publisher: Institute of Electrical and Electronics Engineers
Citation: Portelli, B., Grech, I., Farrugia, R., Micallef, J., Casha, O. & Gatt, E. (2020). Resonant micro-mirror oscillation amplitude measurement and all digital actuation. 2020 Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS (DTIP), Lyon.
Abstract: The accurate measurement of oscillation amplitude in high frequency resonant micro-mirrors is critical for the correct operation in high precision applications. This paper proposes a novel technique for measuring the oscillation amplitude using a single photodiode placed in the path of the reflected laser beam. Furthermore, for the first time, a measurement-based comparison for different all-digital fractional-N dividers used for the fine adjustment of the mirror drive frequency is presented. It was found that the dithering method, typically used in instrumentation applications, can be successfully applied for the drive of high performance micro-mirrors whilst requiring minimal circuit complexity.
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