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Title: Analysis of dynamic deformation in 1-D resonating micromirrors
Authors: Farrugia, Russell
Grech, Ivan
Casha, Owen
Micallef, Joseph
Gatt, Edward
Keywords: Optical scanners
Finite element method
Springs (Mechanism)
Issue Date: 2016
Publisher: Institute of Electrical and Electronics Engineers Inc.
Citation: Farrugia, R., Grech, I., Casha, O., Micallef, J., & Gatt, E. (2016). Analysis of dynamic deformation in 1-D resonating micromirrors. Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP), Budapest. 1-6.
Abstract: Dynamic deformation is an important characteristic in high frequency resonating microscanners intended for high definition raster scanning display applications. Out-of-plane deformation resulting from high acceleration loads causes beam divergence which will in turn reduce the optical resolution. This paper presents a detailed analysis on the mechanical design aspects contributing to dynamic deformation such as the micromirror layout and the micromirror-spring linkage design. Applicability of the one dimensional plate theory in evaluating micromirror bending due to inertial loads is investigated using finite element analysis. A comparison among a number of layout designs was carried out with the aim of increasing micromirror bending stiffness in a direction parallel to the axis of rotation. Moreover spring-linkage effects were also addressed and significant improvement in the dynamic deformation was achieved by the inclusion of a gimbal structure between the micromirror and the torsional springs.
Description: The work presented in this paper is part of the research undertaken by the authors in Lab4MEMSII, which is an ENIAC Joint Undertaking financed project.
Appears in Collections:Scholarly Works - FacICTMN

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