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Faculty of Information and Communication Technology
Department of Microelectronics and Nanoelectronics
Dissertations - FacICTMN
Scholarly Works - FacICTMN
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Issue Date
Title
Author(s)
2021
A concave MOEMS scanning diffraction grating for infrared micro-spectrometer applications
Farrugia, Russell
;
Portelli, Barnaby
;
Grech, Ivan
;
Micallef, Joseph
;
Casha, Owen
;
Gatt, Edward
2022
An out-of-plane FR4-MEMS scanning grating for NIR spectrometer applications
Farrugia, Russell
;
Portelli, Barnaby
;
Grech, Ivan
;
Micallef, Joseph
;
Casha, Owen
;
Gatt, Edward
Discover
Author
2
Casha, Owen
2
Gatt, Edward
2
Grech, Ivan
2
Micallef, Joseph
Subject
1
Damping (Mechanics)
1
Diffraction gratings
1
Gas detectors
1
Indoor air quality
1
Infrared spectra
1
Microfabrication
1
Optical detectors
1
Optical MEMS
1
Optical scanners
.
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