Please use this identifier to cite or link to this item: https://www.um.edu.mt/library/oar/handle/123456789/26394
Title: Applications of scanning optical microscopy in materials science to detect bulk microdefects in semiconductors
Authors: Torok, Peter
Mule Stagno, Luciano
Keywords: Infrared telescopes
Micromechanics
Fracture mechanics
Issue Date: 1997
Publisher: Wiley-Blackwell Publishing Ltd.
Citation: Torok, P., & Mule Stagno, L. (1997). Applications of scanning optical microscopy in materials science to detect bulk microdefects in semiconductors. Journal of Microscopy, 188(1), 1-16.
Abstract: We review the application of scanning optical microscopy to bulk microdefect detection in semiconductor materials. After an extensive literature review we summarize theoretical aspects of the scanning infra-red microscope and describe the theory of contrast formation. We also show experimental examples of scanning infra-red images taken by different modes of the microscope and give an experimental confirmation of the contrast theory.
URI: https://www.um.edu.mt/library/oar//handle/123456789/26394
Appears in Collections:Scholarly Works - InsSE

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