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Title: CFD analysis of aerodynamic drag on resonating MEMS micro-scanners
Authors: Farrugia, Russell
Grech, Ivan
Camilleri, Duncan
Micallef, Joseph
Casha, Owen
Gatt, Edward
Keywords: Aerodynamics
Computational fluid dynamics
Electric waves -- Damping
Microelectromechanical systems
Issue Date: 2019
Publisher: Institute of Electrical and Electronics Engineers
Citation: Farrugia, R., Grech, I., Camilleri, D., Micallef, J., Casha, O., & Gatt, E. (2019). CFD analysis of aerodynamic drag on resonating MEMS micro-scanners. 2019 Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS (DTIP), Paris.
Abstract: Computational fluid dynamic (CFD) simulations of the flow induced by a MEMS circular micro-mirror plate undergoing out-of-plane oscillatory rotation are performed. Pressure and viscous contributions to the aerodynamic drag acting on a 1 mm diameter plate are evaluated for a range of scanning frequencies (2 <; f (kHz) <; 36) and amplitudes (2 <; θ max (°) <; 20). Results show that flow separation and inertia effects are significant within the typical operating region of resonant micro-scanners. In this region of operation, a quadratic increase in damping moment with scan frequency and amplitude is observed. The variation of the cycle-averaged drag coefficient with respect to the Reynolds number is presented, providing an accurate representation of air damping in the design process of resonant micro-scanners. The dependence of air damping on thickness of the micro-scanner layer and depth of the underlying cavity is also investigated.
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