Please use this identifier to cite or link to this item:
https://www.um.edu.mt/library/oar/handle/123456789/59270
Title: | CFD analysis of aerodynamic drag on resonating MEMS micro-scanners |
Authors: | Farrugia, Russell Grech, Ivan Camilleri, Duncan Micallef, Joseph Casha, Owen Gatt, Edward |
Keywords: | Aerodynamics Computational fluid dynamics Electric waves -- Damping Microelectromechanical systems |
Issue Date: | 2019 |
Publisher: | Institute of Electrical and Electronics Engineers |
Citation: | Farrugia, R., Grech, I., Camilleri, D., Micallef, J., Casha, O., & Gatt, E. (2019). CFD analysis of aerodynamic drag on resonating MEMS micro-scanners. 2019 Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS (DTIP), Paris. |
Abstract: | Computational fluid dynamic (CFD) simulations of the flow induced by a MEMS circular micro-mirror plate undergoing out-of-plane oscillatory rotation are performed. Pressure and viscous contributions to the aerodynamic drag acting on a 1 mm diameter plate are evaluated for a range of scanning frequencies (2 <; f (kHz) <; 36) and amplitudes (2 <; θ max (°) <; 20). Results show that flow separation and inertia effects are significant within the typical operating region of resonant micro-scanners. In this region of operation, a quadratic increase in damping moment with scan frequency and amplitude is observed. The variation of the cycle-averaged drag coefficient with respect to the Reynolds number is presented, providing an accurate representation of air damping in the design process of resonant micro-scanners. The dependence of air damping on thickness of the micro-scanner layer and depth of the underlying cavity is also investigated. |
URI: | https://www.um.edu.mt/library/oar/handle/123456789/59270 |
Appears in Collections: | Scholarly Works - FacICTMN |
Files in This Item:
File | Description | Size | Format | |
---|---|---|---|---|
CFD_analysis_of_aerodynamic_drag_on_resonating_MEMS_micro-scanners_2019 (1).pdf Restricted Access | 1.42 MB | Adobe PDF | View/Open Request a copy |
Items in OAR@UM are protected by copyright, with all rights reserved, unless otherwise indicated.