Please use this identifier to cite or link to this item: https://www.um.edu.mt/library/oar/handle/123456789/59289
Title: Design and fabrication of high performance resonant micro-mirrors using the standard SOIMUMPS process
Authors: Farrugia, Russell
Portelli, Barnaby
Grech, Ivan
Micallef, Joseph
Casha, Owen
Gatt, Edward
Keywords: Silicon-on-insulator technology
Quantum optics
Issue Date: 2020
Publisher: Institute of Electrical and Electronics Engineers
Citation: Farrugia, R., Portelli, B., Grech, I., Micallef, J., Casha, O., & Gatt, E. (2020). Design and fabrication of high performance resonant micro-mirrors using the standard SOIMUMPS process. Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP 2020), Lyon
Abstract: In this paper, we present the design and comparative analysis of two high frequency resonant micro-mirrors which incorporate direct and indirect electrostatic drive configurations. Innovative claims include: (1) the implementation of high fidelity fluid-structural coupled damping simulations in the design optimization process of indirect drive micro-mirrors; (2) demonstration of an optimized single-Si layer design that maximizes scanning efficiency while achieving minimal mirror dynamic deformation, δdyn. A total optical scan angle, δdyn, of 37° at a scanning frequency, fs , of 25 kHz and a sinusoidal drive voltage amplitude, V drive of 200 V is achieved by the 1 mm-diameter, D, indirect drive micro-mirror design.
URI: https://www.um.edu.mt/library/oar/handle/123456789/59289
Appears in Collections:Scholarly Works - FacICTMN



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