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Title: Theoretical and finite element analysis of dynamic deformation in resonating micromirrors
Authors: Farrugia, Russell
Grech, Ivan
Camilleri, Duncan
Casha, Owen
Gatt, Edward
Micallef, Joseph
Keywords: Fibrous composites
Finite element method -- Data processing
Microelectromechanical systems
Issue Date: 2018
Publisher: Springer
Citation: Farrugia, R., Grech, I., Camilleri, D., Casha, O., Gatt, E., & Micallef, J. (2018). Theoretical and finite element analysis of dynamic deformation in resonating micromirrors. Microsystem Technologies, 24(1), 445-455.
Abstract: Dynamic deformation is one of the limiting factors in the design of high frequency resonating micro-scanners that are intended for high definition raster scanning display applications. Out-of-plane deformation resulting from high acceleration loads causes beam divergence, which will in turn reduce the optical resolution. This paper presents a detailed analysis on the mechanical design aspects contributing to dynamic deformation such as the micromirror layout and the micromirror-spring linkage design. The applicability of one-dimensional plate bending theory in evaluating micromirror deformation due to inertial loads is investigated using finite element analysis. Improved analytical dynamic deformation predictions, which take into consideration the two-dimensional mirror plate twist, will also be presented. A comparison among a number of layout designs was carried out with the aim of increasing micromirror bending stiffness in a direction parallel to the axis of rotation. Moreover, spring-linkage effects were also addressed and a significant improvement in dynamic deformation was achieved with the inclusion of a gimbal structure between the micromirror and the torsion springs. A parametric analysis was also carried out in order to optimise the gimbal frame design in order to comply with the Rayleigh diffraction limit criterion.
Appears in Collections:Scholarly Works - FacEngME
Scholarly Works - FacICTMN

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